MEMS technologies are widely employed in optical fiber communication system. The combination of MEMS and optical technologies is usually named MOEMS (Micro-Opto-Electro-Mechanical Systems). The most widely applied MOMES devices include VOA (Variable Optical Attenuator), OS (Optical Switch), TOF (Tunable Optical Filter), DGE (Dynamic Gain Equalizer), WSS (Wavelength Selective Switch) and OXC (Optical Cross Connect).
VOA is widely employed in optical fiber communication system for optical power equalization. Among the variable approaches, MEMS VOAs are characterized by small size, low cost and easy fabrication. There are mainly two types of MEMS VOAs in applications, MEMS shutter and MEMS mirror. The first is usually thermally actuated and the second is usually actuated by electrostatic force.Continue reading