MEMS is a micro-electro-mechanical system fabricated with IC process. It is usually based on Si-wafer. The mechanical structures are fabricated with processes such as lithography, ion-beam etching, chemical etching and wafer bonding. Meanwhile, electrodes are fabricated along with the mechanical structures for electrical controlling.
MEMS in Life
The fist rotary MEMS motor was born in UC Berkley in 1988, as shown in Fig.1 . Then in 1989, the first lateral comb drive emerged in Sandia National Laboratories, where the structures move laterally to the surface .